Author:
Wörhoff Kerstin,Heideman René G.,Leinse Arne,Hoekman Marcel
Abstract
AbstractPhotonic applications based on planar waveguide technology impose stringent requirements on properties such as optical propagation losses, light coupling to optical fibers, integration density, as well as on reliability and reproducibility. The latter is correlated to a high level of control of the refractive index and waveguide geometry. In this paper, we review a versatile dielectric waveguide platform, called TriPleX, which is based on alternating silicon nitride and silicon dioxide films. Fabrication with CMOS-compatible equipment based on low-pressure chemical vapor deposition enables the realization of stable material compositions being a prerequisite to the control of waveguide properties and modal shape. The transparency window of both materials allows for the realization of low-loss waveguides over a wide wavelength range (400 nm–2.35 μm). Propagation losses as low as 5×10
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference192 articles.
1. Optical for;Fritzsche;Nano Microsystems,2012
2. in;Spencer;Proc IEEE IEEE,2012
3. Integrated planar optical waveguide interferometer biosensors: A comparative review
4. Light;Dai;Sci Appl,2012
5. in International Topical meeting on Microwave The th Asia - Pacific Microwave Photonics Sapporo Japan paper;Taddei;Proc IEEE October,2014
Cited by
194 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献