1. Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Integrated Circuit Science and Engineering , 66346 Tianjin University of Technology , Tianjin , 300384 , China
2. Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, School of Mechanical Engineering , 66346 Tianjin University of Technology , Tianjin 300384 , China
3. 66346 National Demonstration Center for Experimental Mechanical and Electrical Engineering Education (Tianjin University of Technology) , Tianjin 300384 , China