Dreidimensional abbildende Elektronenmikroskope I. Prinzip der Geräte / Threedimensionally Imaging Electron Microscopes

Abstract

Abstract Threedimensionally Imaging Electron Microscopes The principles of new electron optical imaging systems will be described which make possible the threedimensional image construction of a small object. Data of threedimensional Fourier space are collected by the registration of several images using primary beams with different tilting angles. The simplest device of such a type - a magnetic fly's eye system - will lead to spherical aberrrations larger than about 20 mm. It will be shown, that there is a good chance to correct “ring zone segment”-systems to reach atomic resolution with or without image-reconstruction-calculations. Not only microscopes with conventional bright field and dark field imaging but also transmission scanning microscopes can be constructed usind these principles.