1. 26559 Technische Universität Ilmenau , Department of Mechanical Engineering; Institute of Process Measurement and Sensor Technology , Gustav-Kirchhoff-Str. 1 , Ilmenau , Germany
2. Physikalisch-Technische Bundesanstalt (PTB) , Precision Engineering Division, Department Dimensional Nanometrology , Bundesallee 100 , Braunschweig , Germany