Direct-imaging DOEs for high-NA multi-spot confocal microscopy-Reference-Cited by-同舟云学术

Direct-imaging DOEs for high-NA multi-spot confocal microscopy

Published:2020-08-28 Issue:s1 Volume:87 Page:s40-s43
ISSN:2196-7113
Container-title:tm - Technisches Messen
language:en
Short-container-title:

Author:

Li Zheng¹²,Taphanel Miro¹²,Längle Thomas²,Beyerer Jürgen¹²

Affiliation:

1. Lehrstuhl für Interaktive Echtzeitsysteme (IES), Karlsruher Institut für Technologie (KIT) , Karlsruhe , Germany

2. Fraunhofer-Institut für Optronik, Systemtechnik und Bildauswertung IOSB , Karlsruhe , Germany

Abstract

Abstract Diffractive lens arrays with overlapping apertures can produce spots with high numerical apertures (NAs). Such diffractive optical elements (DOEs) can replace high-NA objectives and measure a large area with high resolution in transmission microscopes. However, in reflection microscopes for surface measurements, the axial resolution is still limited by the objectives. Direct-imaging DOEs are proposed to solve the problem. They can perform high-NA multi-spot measurement in reflection configurations in both lateral and axial directions. Experiments demonstrate a lateral non-vanishing contrast up to 1448 lp/mm and an axial response on a plane mirror with a full width at half maximum (FWHM) of 2.24 μm.

Publisher

Walter de Gruyter GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Link

https://www.degruyter.com/document/doi/10.1515/teme-2020-0017/pdf

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