Bilayer PMMA antireflective coatings via microphase separation and MAPLE

Abstract

Abstract A poly(methyl methacrylate) (PMMA) bilayer antireflective coating (ARC) is designed based on polymeric microphase separation and matrix-assisted pulsed laser evaporation (MAPLE). The spin-coated layer shows subwavelength porous network structures, after phase separation via annealing and removal of the polystyrene (PS) phase, while the MAPLE deposited surface layer exhibits a biomimic moth-eye structure on glass to trap the incident light. The elaborate spin coated structure can be controlled flexibly by changing the ratio of mixture, annealing time and temperature, and the moth-eye structure can also be tuned by deposition parameters. The transmittance of the ARC presents a maximum of 95.64% and an average of 94.81% in visible range. The moth-eye structure on glass substrate formed by nanoglobules makes positive contributions to the improvement of transmittance according to UV–Vis result and simulation. The wetting motion of PMMA globules is observed as well by the comparison of AFM surface morphologies and cross-sectional profiles of globules on glass and polymer thin film. This work is a novel attempt to fabricate bilayer ARC with two different structures by a single polymeric material and will provide new route for fabrication of multilayer ARCs.