1. Brandenburgische Technische Universität, Cottbus–Senftenberg, Computer Engineering Institute , Konrad-Wachsmann-Allee 5, 03046 Cottbus , Germany
2. IHP – Leibniz Institute for High Performance Microelectronics , Im Technologiepark 25, 15236 Frankfurt (Oder) , Germany
3. Chair of Micro- and Nanosystems Technology , Technische Universität München , Munich , Germany
4. Fraunhofer EMFT Fraunhofer Institute for Electronic Microsystems and Solid State Technologies , Munich , Germany