Multilevel effective material approximation for modeling ellipsometric measurements on complex porous thin films

Author:

Sachse René1ORCID,Hodoroaba Vasile-Dan1ORCID,Kraehnert Ralph2ORCID,Hertwig Andreas1ORCID

Affiliation:

1. Federal Institute for Materials Research and Testing (BAM) , Unter den Eichen 44-46, 12203 Berlin , Germany

2. Technische Universität Berlin , Straße des 17. Juni 135, 10623 Berlin , Germany

Abstract

Abstract Catalysts are important components in chemical processes because they lower the activation energy and thus determine the rate, efficiency and selectivity of a chemical reaction. This property plays an important role in many of today’s processes, including the electrochemical splitting of water. Due to the continuous development of catalyst materials, they are becoming more complex, which makes a reliable evaluation of physicochemical properties challenging even for modern analytical measurement techniques and industrial manufacturing. We present a fast, vacuum-free and non-destructive analytical approach using multi-sample spectroscopic ellipsometry to determine relevant material parameters such as film thickness, porosity and composition of mesoporous IrOx–TiOy films. Mesoporous IrOx–TiOy films were deposited on Si wafers by sol–gel synthesis, varying the composition of the mixed oxide films between 0 and 100 wt%Ir. The ellipsometric modeling is based on an anisotropic Bruggeman effective medium approximation (a-BEMA) to determine the film thickness and volume fraction of the material and pores. The volume fraction of the material was again modeled using a Bruggeman EMA to determine the chemical composition of the materials. The ellipsometric fitting results were compared with complementary methods, such as scanning electron microscopy (SEM), electron probe microanalysis (EPMA) as well as environmental ellipsometric porosimetry (EEP).

Funder

Project ATMOC

EMPIR programme co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation programme

DFG via SPP2080

BMBF project ATO–KAT

Publisher

Walter de Gruyter GmbH

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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