Affiliation:
1. Department of Mechanical Engineering, Kobe University, Kobe 657–8501, Japan
Abstract
Abstract
We fabricated piezoelectric vibration energy harvesters of c-axis-oriented epitaxial Pb(Zr,Ti)O3 (PZT) thin films on stainless steel (SS304) cantilevers in an effort to improve their power-generation efficiency and toughness. Using radio-frequency magnetron sputtering, we deposited the epitaxial PZT thin films on the MgO substrates, and then transferred the PZT films onto microfabricated SS304 cantilevers using laser lift-off (LLO). LLO did not degrade the transferred epitaxial PZT thin films, which exhibited a high piezoelectric coefficient (e
31,f
=–4.8 C/m2) and a low relative dielectric constant (ε
r=340), comparable to those of the original PZT thin film on MgO. At a resonance frequency of 143 Hz, the energy harvesters generated large output power of 1.8 μW at an acceleration of 1.0 m/s2, and the output power reached a maximum of 49 μW at an acceleration of 7.5 m/s2.
Subject
Electrochemistry,Electrical and Electronic Engineering,Energy Engineering and Power Technology,Renewable Energy, Sustainability and the Environment
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