Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing-Reference-Cited by-同舟云学术

Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing

Published:2020-01-01 Issue:1 Volume:59 Page:306-313
ISSN:1605-8127
Container-title:REVIEWS ON ADVANCED MATERIALS SCIENCE
language:en
Short-container-title:

Author:

Simionescu Octavian-Gabriel¹,Pachiu Cristina²,Ionescu Octavian²,Dumbrăvescu Niculae²,Buiu Octavian²,Popa Radu Cristian²,Avram Andrei²,Dinescu Gheorghe³

Affiliation:

1. National Institute for Research and Development in Microtechnologies -IMT Bucharest , 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190 , Romania ; Faculty of Physics , University of Bucharest , 405 Atomistilor Street, Magurele city, Ilfov county, 077125 , Romania

2. National Institute for Research and Development in Microtechnologies - IMT Bucharest , 126A Erou Iancu Nicolae Street , Voluntari city , Ilfov county, 077190 , Romania

3. National Institute for Laser, Plasma and Radiation Physics , 409 Atomistilor Street , Magurele city , Ilfov county, 077125 , Romania ; Faculty of Physics , University of Bucharest , 405 Atomistilor Street, Magurele city, Ilfov county, 077125 , Romania

Abstract

Abstract Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was established in order to use the material as a piezoresitive element. Preliminary electrical measurements under mechanical strain were performed in order to test the piezoresistive response of the material and promising GF values of 50 − 250 at 1% strain were obtained.

Publisher

Walter de Gruyter GmbH

Subject

Condensed Matter Physics,General Materials Science

Link

https://www.degruyter.com/document/doi/10.1515/rams-2020-0031/pdf

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