Impact of carbon content on the phase structure and mechanical properties of TiBCN coatings <i>via</i> direct current magnetron sputtering-Reference-Cited by-同舟云学术

Impact of carbon content on the phase structure and mechanical properties of TiBCN coatings via direct current magnetron sputtering

Published:2024-01-01 Issue:1 Volume:63 Page:
ISSN:1605-8127
Container-title:REVIEWS ON ADVANCED MATERIALS SCIENCE
language:en
Short-container-title:

Author:

Vyas Anand¹,Aliyu Ahmed²³,Tsui Gary Chi-Pong⁴

Affiliation:

1. Division of Science, Engineering and Health Studies, SPEED, The Hong Kong Polytechnic University , Hong Kong , China

2. Department of Chemical Engineering, Federal University Wukari , Wukari , Taraba State , Nigeria

3. Department of Materials Engineering, Indian Institute of Science , Bangalore , India

4. State Key Laboratory of Ultra-precision Machining Technology, Department of Industrial and System Engineering, The Hong Kong Polytechnic University , Hong Kong , China

Abstract

Abstract In this study, unbalanced direct current magnetron sputtering was employed to develop TiBCN coatings on Si (100) wafers. The carbon (C) concentration was varied to manipulate the phase structure and mechanical properties of the coatings. The coatings were analyzed using Raman spectroscopy, scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and nanoindentation. The results revealed that the TiBCN-2 coating, with a C concentration of 4.4 at.%, exhibited optimal hardness and elastic modulus values of 33 and 291 GPa, respectively. On the other hand, as the C content increased from 4.4 to 24.4 at.%, the hardness and elastic modulus values of the coatings decreased to 21 and 225 GPa, respectively, due to the formation of boron nitride and carbon phases within the coating matrix. Therefore, the inclusion of an ideal C concentration can considerably improve the properties of TiBCN coatings, thus rendering the coating a desirable material for cutting tools.

Publisher

Walter de Gruyter GmbH

Link

https://www.degruyter.com/document/doi/10.1515/rams-2024-0013/pdf

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