Impurity detection in polymer parts for the semiconductor manufacturing industry-Reference-Cited by-同舟云学术

Impurity detection in polymer parts for the semiconductor manufacturing industry

Published:2018-09-08 Issue:11 Volume:85 Page:700-712
ISSN:2196-7113
Container-title:tm - Technisches Messen
language:en
Short-container-title:

Author:

Moldaschl T.¹,Arnold T.¹,Zauner M.¹,Meislitzer S.²,Obersteiner D.¹,De Biasio M.¹,Steinbrener J.¹,Neumaier L.¹,Molzbichler Albert³,Cramer Heinz³,Ottersböck B.⁴,Oreski G.⁴,Voronko Y.⁵,Kraft M.¹,Hirschl Christina¹

Affiliation:

1. 226176 CTR Carinthian Tech Research AG , Europastrasse 12 , 9524 Villach , Austria

2. Meislitzer Präzisionstechnik GmbH , Haiderbach 11 , 9563 Haiderbach , Austria

3. 497048 Lam Research AG Austria , SEZ-Strasse 1 , 9500 Villach , Austria

4. 226178 PCCL Polymer Competence Center Leoben , Roseggerstrasse 12 , 8700 Leoben , Austria

5. 343029 OFI Technologie & Innovation GmbH , Franz-Grill-Straße 5 , 1030 Wien , Austria

Abstract

Abstract The very strict purity requirements of polymer parts that are used in the semiconductor manufacturing industry lead to an excessively low yield rate. To decrease the costs in the production chain, detailed knowledge about possible impurities during each processing step is essential. This work provides an overview of non-destructive testing techniques that are capable of either detecting or even identifying these impurities. The most promising techniques were then combined in a semi-automatized laboratory demonstrator that can be used as an in-line diagnostics tool to prevent processing of faulty parts. Results from these measurements are presented and discussed.

Funder

Österreichische Forschungsförderungsgesellschaft

Publisher

Walter de Gruyter GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Link

https://www.degruyter.com/document/doi/10.1515/teme-2018-0056/pdf

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