Affiliation:
1. Ultra-precision Optoelectronic Instrument Engineering Center, Harbin, Heilongjiang, PR China
Abstract
Abstract
In order to solve the problem of stylus vibration of the spherical
capacitive probe with ultra-large aspect ratio, modal analysis of
the stylus is done and optimal design of stylus structure is carried out. The
Euler–Bernoulli Beam model is introduced to build the dynamic equation of
lateral vibration of the stylus. Based on results of modal analysis and
simulation, the first order natural frequency of the stylus is optimized to
near 100 Hz, and the resolution of the probing sensor is improved from 20 nm
to 4 nm with adoption of damping material.
Subject
Electrical and Electronic Engineering,Instrumentation
Cited by
1 articles.
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