Affiliation:
1. 1Ruhr University, Bochum
Abstract
Abstract With full electromagnetic treatment electron pressure effects are included in the calculation of plasma impedances and power transfer to a plasma cylinder in the domain of the lower hybrid resonance. The general results are applied to cases of interest in radio frequency discharges with azimuthally symmetric excitation and zero coil-plasma-gap. For these specific situations the effects of electron pressure are found to be small.
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy,Mathematical Physics
Cited by
4 articles.
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