Affiliation:
1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China , Chengdu 610054 , P. R. China
2. Southwest Institute of Technical Physics , Chengdu 610041 , P. R. China
Abstract
Abstract
Nano-opto-electro-mechanical systems (NOEMS), considered as new platforms to study electronic and mechanical freedoms in the field of nanophotonics, have gained rapid progress in recent years. NOEMS offer exciting opportunities to manipulate information carriers using optical, electrical, and mechanical degrees of freedom, where the flow of light, dynamics of electrons, and mechanical vibration modes can be explored in both classical and quantum domains. By exploiting NOEMS concepts and technologies, high speed and low-power consumption switches, high-efficiency microwave-optical conversion devices, and multiple quantum information processing functions can be implemented through on-chip integration. This review will introduce the principles of NOEMS, summarize the recent developments, and important achievements, and give a prospect for the further applications and developments in this field.
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials,Biotechnology
Cited by
8 articles.
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