1. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering , Beijing Institute of Technology , Beijing 100081 , China
2. Beijing Institute of Technology Chongqing Innovation Center , Chongqing , 401120 , China
3. School of Optics and Photonics , Beijing Institute of Technology , Beijing 100081 , China
4. Han’s Laser Technology Centre , Shennan Ave No. 9988, Nanshan District , Shenzhen , Guangdong , 518057 , China