1. Laser Micro/Nano-Fabrication Laboratory , School of Mechanical Engineering, Beijing Institute of Technology , Beijing 100081 , China
2. Beijing Institute of Technology Chongqing Innovation Center , Chongqing 401120 , China
3. Beijing Engineering Research Center of Applied Laser Technology, Beijing University of Technology , Beijing 100124 , China
4. School of Mechanical and Electrical Engineering, Wuhan Institute of Technology , Wuhan 430073 , China