Qualitative analysis of the vapour-phase equilibrium composition in the systems Si-Cl and Si-Cl-H by matrix-isolation IR spectroscopy

Abstract

The vapour phase in the systems Si-Cl and Si-Cl-H in equilibrium with solid silicon has been analyzed quantitatively by matrix-isolation IR spectroscopy. At 1 300 K, the analysis revealed SiCl4, SiCl3 and SiCl2 in the system Si-Cl, and HCl, SiCl4, SiCl3, SiCl2, SiHCl3 and SiH2Cl2 in the system Si-Cl-H. No SiHCl, a compound which according to equilibrium calculations represents one of the dominant components, could be detected.