Microwave plasma generation using evanescent waves

Author:

Perevertailo Volodymyr VolodymyrovychORCID,Kuzmichev Anatoly IvanovitchORCID

Publisher

Kyiv Politechnic Institute

Subject

General Medicine

Reference13 articles.

1. B. Danilin, Primenenie nizkotemperaturnoi plazmy dlia naneseniia tonkih plenok [Low-temperature plasma application for thin film deposition], Moscow: Energoatomizdat, 1989, p. 328. ISBN 5-283-03939-0

2. B. Danilin; V.Kireev, Primenenie nizkotemperaturnoi plazmy dlia travlenia i ochistki materialov [Low-temperature plasma application for etching and cleaning of materials], Moscow: Energoatomizdat, 1987, p. 264.

3. N. G. Einspruch; D. M. Brown, Plasma processing for VLSI, Orlando: Academic Press, 1984, p. 469.

4. Y. N. Korkishko, Vvedenie v protsessy integralnykh mikro- i nanotehnologyi. Tom 2: Tehnologicheskie aspekty [Introduction to processes of integral micro- and nanotechnology. Vol. 2. Technological aspects], vol. 2, Moscow: BINOM. Laboratory of knowledge, 2011, p. 252. ISBN 5-9963-0336-6

5. Bezelektrodnyi activator reaktsionnogo gaza dlia opticheskoi tonkoplenochnoi technologii. [Electrodeless activator of reactive gas for optical thin-film technology];Volpian;Nanoingeneria,2014

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