1. 1)Japanese Standards Association, JIS(Japanese Industrial Standards) C0116 (1998).
2. 2)International Electrotechnical Commission, IEC 60721-3-3 Ed. 2.2:2002 (b)(2002).
3. 3)Japanese Electronic Industry Development Association, JEIDA-63-2000 (2000).
4. 4)Instrument Society of America, ISA-S71.04-1985 Environmental Conditions for Process Measurements and Control Systems: Airborne Contaminants, Instrument Society of America (1985).
5. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung