512 × 512 Port 3D MEMS Optical Switch Module with Toroidal Concave Mirror
Author:
Kawajiri Yuko1, Nemoto Naru1, Hadama Koichi1, Ishii Yuzo1, Makihara Mitsuhiro1, Yamaguchi Joji1, Yamamoto Tsuyoshi1
Affiliation:
1. NTT Microsystem Integration Laboratories, NTT Corporation
Publisher
NTT Science and Core Technology Laboratory Group
Reference8 articles.
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https://www.ntt-review.jp/archive/ntttechnical.php?contents=ntr200710sp5.html 5. V. A. Aksyuk, S. Arney, N. R. Basavanhally, D. J. Bishop, C. A. Bolle, C. C. Chang, R. Frahm, A. Gasparyan, J. V. Gates, R. George, C. R. Giles, J. Kim, P. R. Kolodner, T. M. Lee, D. T. Neilson, C. Nijander, C. J. Nuzman, M. Paczkowski, A. R. Papazian, F. Pardo, D. A. Ramsey, R. Ryf, R. E. Scotti, H. Shea, and M. E. Simon, “238 x 238 Micromechanical Optical Cross Connect,” IEEE Photonics Technology Letters, Vol. 15, No. 4, pp. 587–589, 2003.
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