Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes-Reference-Cited by-同舟云学术

Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Published:2004-02 Issue:2 Volume:54 Page:218-228
ISSN:1096-2247
Container-title:Journal of the Air & Waste Management Association
language:en
Short-container-title:Journal of the Air & Waste Management Association

Author:

Chein HungMin¹,Chen Tzu Ming¹,Aggarwal Shankar Gopala¹,Tsai Chuen-Jinn²,Huang Chun-Chao²

Affiliation:

1. a Center for Environmental, Safety, and Health Technology Development , Industrial Technology Research Institute , Hsin-chu , Taiwan

2. b Institute of Environmental Engineering, National Chiao Tung University , Hsin-chu , Taiwan

Publisher

Informa UK Limited

Subject

Management, Monitoring, Policy and Law,Waste Management and Disposal

Link

https://www.tandfonline.com/doi/pdf/10.1080/10473289.2004.10470898

Reference9 articles.

1. Air Pollution Regulation and Emission Standard for Semiconductor Manufacturing Industry; Taiwan Environmental Protection Administration: Taipei, Taiwan, Republic of China, April 2000.

2. Compilation of Air Pollutant Emission Factor Volume I: Stationary Point and Area Sources, 5th ed.; U.S. Environmental Protection Agency: Raleigh, NC, January 1995.

3. The Emission Inventory: Regional Strategies for the Future, Proceedings of a Specialty Conference; Air & Waste Management Association and U.S. Environmental Protection Agency: Raleigh, NC, October 1999.

4. Handbook forEstimation of'Taiwan Air' Pollutant Emission; Environmental Protection Administration: Taipei, Taiwan, Republic of China, September 2000.

5. Chein, H.M.; Chen, T.M. Estimation of VOCs Emission Factor for Semiconductor Manufacturing Processes. In Proceedings ofAir Pollution IX, Wessex Institute of Technology, United Kingdom, September 2001; pp 491–500.

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