Author:
ABUZEID SALEM,BUSNAINA AHMED A.,AHMADI GOODARZ
Subject
General Chemical Engineering
Reference20 articles.
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2. Particulate Contamination and Microelectronics Manufacturing: An Introduction
3. Particle Deposition on Semiconductor Wafers
4. Fuchs , N. A. “ The Mechanics of Aerosol,” Pergamon , Oxford , 1964 .
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3 articles.
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