Effect of precursor gas inlet position relative to hot wire cells in HWC-IP-PECVD systems for low-temperature graphene growth

Author:

Yusuf Andi Momang12,Abidin Kurniati1,Eliyana Ajeng1,Usman Ida3,Malago Jasruddin Daud2,Noor Fatimah Arofiati1ORCID,Winata Toto1

Affiliation:

1. Physics of Electronic Materials Research Division, Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung, Indonesia

2. Physics of Materials Group, Department of Physics, Faculty of Mathematics and Natural Science, Universitas Negeri Makassar, Makassar, Indonesia

3. Department of Physics, Faculty of Mathematics and Natural Science, Universitas Halu Oleo Jalan H.E.A. Mokodompit, Kendari, Indonesia

Funder

This work is financially supported by Research, Community Services, and Innovation Program (PPMI) ITB research grant in the fiscal year 2022

Publisher

Informa UK Limited

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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