Studies of the mechanism of the decomposition of hydrogenated a-Si films
Author:
Affiliation:
1. a Heriot-Watt University , Riccarton, Currie, Edinburgh , EH14 4AS , Scotland
2. b Department of Chemistry.
3. c Department of Physics.
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/01418638008224033
Reference16 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. Quantitative analysis of hydrogen in glow discharge amorphous silicon
3. Infrared vibrational spectra of rf-sputtered hydrogenated amorphous silicon
4. Thermal dehydrogenation of glow discharge a-Si
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