1. § 11.3.1;SMITH R.,1959
2. HOLLAND , L. 1956. Vacuum Deposition of Thin Films, 193Chapman & Hall.
3. Sheet resistance control of thin Cr-SiO films
4. GLANG , R. 1970. Handbook of Thin Film Technology, Edited by:
Maissel , L. and
Glang , R. 1New York: McGraw-Hill.