Non-Destructive Thin Film Thickness Measurement based on Coplanar Capacitive Sensor and Printed Circuit Board Platform-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Non-Destructive Thin Film Thickness Measurement based on Coplanar Capacitive Sensor and Printed Circuit Board Platform

Published:2024-02-20 Issue: Volume: Page:1-11
ISSN:0377-2063
Container-title:IETE Journal of Research
language:en
Short-container-title:IETE Journal of Research

Author:

Dac Hai Nguyen¹^ORCID,Anh Dung Nguyen¹,Quoc Tuan Vu²,Tham Do Quang³,Manh Kha Hoang¹,Duc Trinh Chu²

Affiliation:

1. Faculty of Electronics, Hanoi University of Industry, 298 Cau Dien, Hanoi, Vietnam

2. Faculty of Electronics and Telecommunications, VNU University of Engineering and Technology, E3 Building, 144 Xuan Thuy, Hanoi, Vietnam

3. Department of Physico - Chemistry of Non-metallic Materials, Institute for Tropical Technology, Vietnam Academy of Science and Technology (ITT, VAST), 18 Hoang Quoc Viet - Cau Giay, Hanoi, Vietnam

Funder

Hanoi University of Industry Research Fund

Publisher

Informa UK Limited

Link

https://www.tandfonline.com/doi/pdf/10.1080/03772063.2024.2315209

Reference21 articles.

1. Fabrication of ultrathin film capacitors by chemical solution deposition

2. Thin Film Piezoelectrics for MEMS

3. Ferroelectricity at the Nanoscale: Local Polarization in Oxide Thin Films and Heterostructures

4. The instability of polycrystalline thin films;Miller K. T.;J. Mater. Res.,1990

5. Control of Leakage Resistance in Pb(Zr,Ti)O3 Thin Films by Donor Doping

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP