Subject
Electrical and Electronic Engineering,Computer Science Applications,Theoretical Computer Science
Reference11 articles.
1. Ranges and Distributions of Ions Implanted in Dielectrics
2. Douglas (E C) et al.Ion-Implantation Basics, by RCA. Laboratories, Princeton, New Jersey, U.S.A. PRRL-72-TR-100, June 26, 1972, p. 1–61.
3. Ion implantation in semiconductors—Part II: Damage production and annealing