Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(METHD) 2 , Zr(METHD) 4 and Ti(MPD)(METHD) 2-Reference-Cited by-同舟云学术

Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(METHD) 2 , Zr(METHD) 4 and Ti(MPD)(METHD) 2

Published:2002-01 Issue:1 Volume:46 Page:115-124
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Otani Yohei¹,Abe Norikazu¹,Ueda Yoshiki¹,Miyake Masato¹,Okamura Soichiro¹,Shiosaki Tadashi¹

Affiliation:

1. a Graduate School of Materials Science , Nara Institute of Science and Technology (NAIST) , 8916-5 Takayama-cho, Ikoma, Nara , 630-0101 , Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580215398

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1. Characteristics of ferroelectric Sr0.7Bi2.1Ta2.0O9 thin films grown by liquid delivery metal organic chemical vapor deposition process;Thin Solid Films;2005-12

2. Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition;Key Engineering Materials;2004-05

3. Good Ferroelectricity of Pb(Zr,Ti)O3Thin Films Fabricated by Highly Reproducible Deposition on Bottom Ir Electrode at 395°C;Japanese Journal of Applied Physics;2003-09-15

4. Influence of Post-Annealing on the Characteristics of Pb(Zr,Ti)O 3 Thin Films Deposited by Liquid Delivery MOCVD Using a Cocktail Solution;Integrated Ferroelectrics;2003-06-01

5. Influence of Pt/TiO2 bottom electrodes on the properties of ferroelectric Pb(Zr,Ti)O-3 thin films;INTEGR FERROELECTR;2003