Growth of (Ba,Sr)TiO 3 Thin Films by MOCVD: Stoichiometry Effects
Author:
Affiliation:
1. a IFF/EKM , Forschungszentrum Jülich GmbH , Jülich , D-52425 , Germany
2. b AIXTRON AG , Kackertstr. 15 - 17, Aachen , D-52072 , Germany
3. c ZCH , Forschungszentrum Jülich GmbH , Jülich , D-52425 , Germany
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584580215342
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. THE OPTICAL DIELECTRIC FUNCTION IN MONOLITHIC Ba x Sr1-x TiO 3 FILMS;Integrated Ferroelectrics;2010-03-18
2. Electrical properties of (Ba,Sr)TiO3 thin films revisited: The case of chemical vapor deposited films on Pt electrodes;Journal of Applied Physics;2006-06
3. Metal-organic chemical-vapor deposition of (Ba,Sr)TiO3: Nucleation and growth on Pt-(111);Journal of Applied Physics;2005-10-15
4. Comparison of precursors for pulsed metal–organic chemical vapor deposition of HfO2 high-K dielectric thin films;Thin Solid Films;2005-05
5. (Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor;Journal of the European Ceramic Society;2004-01
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