CHARACTERISATION OF FERROELECTRIC PbZrXTi1-XO3 (PZT) THIN FILMS PREPARED BY LIQUID-DELIVERY METALORGANIC CHEMICAL VAPOR DEPOSITION-Reference-Cited by-同舟云学术

CHARACTERISATION OF FERROELECTRIC PbZrXTi1-XO3 (PZT) THIN FILMS PREPARED BY LIQUID-DELIVERY METALORGANIC CHEMICAL VAPOR DEPOSITION

Published:2006-08-17 Issue:1 Volume:81 Page:289-295
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

MATICHYN S.¹,LISKER M.¹,SILINSKAS M.¹,GARKE B.²,BURTE E.¹

Affiliation:

1. a Institute of Micro and Sensor Systems, Otto von Guericke University Magdeburg, Universitätsplatz 2 , Magdeburg, 39106, Germany

2. b Institute of Experimental Physics, Otto von Guericke University Magdeburg, Universitätsplatz 2 , Magdeburg, 39106, Germany

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600663748

Reference10 articles.

1. Epitaxial-grade polycrystalline Pb(Zr,Ti)O3 film deposited at low temperature by pulsed-metalorganic chemical vapor deposition

2. Preparation of Pb-Based Ferroelectric Thin Films at Room Temperature Using Excimer-Laser-Assisted Multi-Ion-Beam Sputtering

3. Processing Effects in the Sol-Gel Preparation of PZT Dried Gels, Powders, and Ferroelectric Thin Layers

4. Preparation of Pb(Zr, Ti)O3Films on Si Substrate by Laser Ablation

5. Development of ferroelectric Pb(ZrxTi1−x)O3thin films by metallo-organic decomposition process and rapid thermal annealing

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1. Novel patterning of composite thick film PZT;Journal of Electroceramics;2007-09-18