Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy-Reference-Cited by-同舟云学术

Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy

Published:2001-02 Issue:1-4 Volume:35 Page:185-197
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Nam Hyo-Jin¹,Cho Seong-Moon¹,Yee Youngjoo¹,Lee Heon-Min¹,Kim Dong-Chun¹,Bu Jong-Uk¹,Hong Jaewan²

Affiliation:

1. a LG Corporate Institute of Technology , Seoul, 137–724, Korea

2. b PSIA Corporation, Yang-Jae Dong 5–6 , Seoul, 137–070, Korea

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580108016900

Reference9 articles.

1. Noncontact nanolithography using the atomic force microscope

2. Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage

3. Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators

4. Automated parallel high-speed atomic force microscopy

5. High‐speed atomic force microscopy using an integrated actuator and optical lever detection

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