(Zr/Ti) ratio effect on RF magnetron sputtered lead titanate zirconate films-Reference-Cited by-同舟云学术

(Zr/Ti) ratio effect on RF magnetron sputtered lead titanate zirconate films

Published:2001-02 Issue:1-4 Volume:35 Page:229-238
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Soyer C.¹,Haccart T.¹,Cattan E.¹,Remiens D.¹

Affiliation:

1. a LAMAC, Université de Valenciennes et du Hainaut-Cambrésis Z.I. du Champ del'Abbesse , 59600-Maubeuge, France

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580108016904

Reference18 articles.

1. Pyroelectric characteristics of a thin PZT (40/60) film on a platinum film for infrared sensors

2. Measurement of piezoelectric coefficients of ferroelectric thin films

3. Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

4. Characterization of sol-gel Pb(Zr0.53Ti0.47)O3 films in the thickness range 0.25–10 μm

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1. Some Nonlinear Electromechanical Properties of Thin PZT and ZnO Compositions Deposited on the Si-Substrate;Ferroelectrics;2008-10-21

2. Thin Pb(ZrxTi1−x)O3(PZT) Rhombohedral Compositions Deposited on the Si-Substrate and Its Non-Linear Piezoelectric Response;Ferroelectrics;2007-06-08

3. Electrical property evaluation of manganese-fluorine codoping of lead zirconate titanate thin films: Compatibility between hard material and piezoelectric activity;Journal of Applied Physics;2006-11

4. Non-linear piezoelectric properties of the thin Pb(ZrxTi1−x)O3 (PZT) films deposited on the Si-substrate;Journal of the European Ceramic Society;2005-01

5. Dielectric and Electromechanical Properties of Pb(Zr,Ti)O3Thin Films for Piezo-Microelectromechanical System Devices;Japanese Journal of Applied Physics;2003-09-30