Preparation of PNN-PZT Thick Film on Pt/Ti/SiO2/Si Substrate by Laser Lift-Off Process-Reference-Cited by-同舟云学术

Preparation of PNN-PZT Thick Film on Pt/Ti/SiO2/Si Substrate by Laser Lift-Off Process

Published:2005-01-01 Issue:1 Volume:69 Page:135-141
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Li1 Kun-Yu¹,Tai1 Nyan-Hwa¹,Lin23 I-Nan²³

Affiliation:

1. Department of Material Science and Engineering , Tamsui, Taiwan, 251, Republic of China

2. Material Science Center, National Tsing-Hua University , Hsinchu, 300, Taiwan, Republic of China

3. Department of Physics, Tamkang University , Tamsui, Taiwan, 251, Republic of China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580590897470

Reference14 articles.

1. Sol-gel derived PZT force sensor for scanning force microscopy

2. Thin-film piezoelectric acoustic sensors. Application to the detection of hydrocarbons

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