Electrical Properties of Screen Printed PZT Thick Films Infiltrated with Photo-Sensitive Sol Compared with Normal Sol for Cantilever Type Biochip-Reference-Cited by-同舟云学术

Electrical Properties of Screen Printed PZT Thick Films Infiltrated with Photo-Sensitive Sol Compared with Normal Sol for Cantilever Type Biochip

Published:2005-01-01 Issue:1 Volume:69 Page:163-171
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Park Jae Hong¹²,Son Jin Ho¹,Yoon Dae Sung¹,Kim Tae Song¹,Park Hyoung-Ho³,Kim Hwan²

Affiliation:

1. aMicrosystem Research Center, Korea Institute of Science and Technology , Seoul, 136-791, Korea

2. cDivision of Material Science and Engineering, Seoul National University , Seoul, 151-744, Korea

3. bDepartment of Ceramic Engineering, Yonsei University , Seoul, 120-749, Korea

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580590898613

Reference20 articles.

1. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems

2. Investigation of factors affecting the preparation of PZT thick films

3. Silicon micromachining processes combined with thick-film printed lead zirconate titanate actuators for microelectromechanical systems

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