METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF PbZrxTi1 –xO3 THIN FILMS ON Ir–Ru ALLOY ELECTRODES
Author:
Affiliation:
1. a Samsung Advanced Institute of Technology , Suwon, 440-600, Korea
2. c Division of Photonic Engineering , Chosun University , Gwangju, 501-759, Korea
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584580601085214
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4. Low Temperature MOCVD of Thin Film PZT
5. Cation Composition Control of MOCVD (Ba,Sr)TiO[sub 3] Thin Films along the Capacitor Hole
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