Sol-Gel PZT for MEMS Applications-Reference-Cited by-同舟云学术

Sol-Gel PZT for MEMS Applications

Published:2002-01 Issue:1 Volume:42 Page:25-37
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Piekarski Brett¹,Dubey Madan¹,Zakar Eugene¹,Polcawich Ronald¹,Devoe Don²,Wickenden Dennis³

Affiliation:

1. a U.S. Army Research Laboratory , Adelphi, Maryland, 20783

2. b Department of Mechanical Engineering and Institute for Systems Research , University of Maryland , College Park, Maryland, 20742

3. c Applied Physics Laboratory , The Johns Hopkins University , Laurel, Maryland, 20723

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580210868

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