Integration of Piezoelectric PZT Thin Films with Internal Electrodes into an Actuator Structure for MEMS Applications-Reference-Cited by-同舟云学术

Integration of Piezoelectric PZT Thin Films with Internal Electrodes into an Actuator Structure for MEMS Applications

Published:2002-01 Issue:1 Volume:50 Page:21-32
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Hoffmann M.¹,Leuerer T.²,Liedtke R.¹,Böttger U.¹,Mokwa W.²,Waser R.¹³

Affiliation:

1. a Institute of Materials in Electrical Engineering II , University of Aachen , Sommerfeldstr 24, Aachen , 52074 , Germany

2. b Institute of Materials in Electrical Engineering I , University of Aachen , Sommerfeldstr 24, Aachen , 52074 , Germany

3. c Department IFF, Research Center Juelich , Institute of Electroceramic Materials (EKM) , Juelich , 52425 , Germany

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580215526

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