Low-Leakage Epitaxial PZT Thin Films Grown on Ir/MgO Substrates by Metalorganic Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Low-Leakage Epitaxial PZT Thin Films Grown on Ir/MgO Substrates by Metalorganic Chemical Vapor Deposition

Published:2002-01 Issue:1 Volume:46 Page:55-64
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Oikawa T.¹,Takahashi K.¹,Ishida J.²,Ichikawa Y.³,Ochiai T.³,Saito K.⁴,Sawabe A.²,Funakubo H.⁵

Affiliation:

1. a Department of Innovative and Engineered Materials , Tokyo Institute of Technology , 4259 Nagatsuta-cho, Midori-ku, Yokohama , 226-8502 , Japan

2. b Department of Electrical Engineering and Electronics , Aoyama Gakuin University , 6-16-1 Chitosedai, Setagaya-ku, Tokyo , 157-8572 , Japan

3. c TOYO Corporation , 1-6, Yaesu 1-chome, Chuo-ku, Tokyo , 103-8284 , Japan

4. d Analytical Division, Philips Japan, Ltd. , 35-1, Sagamiohno 7-chome, Sagamihara-shi, Kanagawa , 228-8505 , Japan

5. e Department of Innovative and Engineered Materials , Tokyo Institute of Technology , 4259 Nagatsuta-cho, Midori-ku, Yokohama , 226-8502 , Japan E-mail:

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580215390

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