Author:
Kudryashov Sergey I.,Allen Susan D.,Shukla Shishir D.
Subject
General Chemical Engineering
Reference40 articles.
1. Nanoparticle removal from substrates with pulsed-laser induced plasma and shock waves
2. Engelsberg , A. C. 1998 . Transition from laboratory to manufacturing for a dry, laser-assisted cleaning technology. InLaser Applications in Microelectronic and Optoelectronic Manufacturing III. Bellingham , Wash. : SPIE . p. 100 .
Cited by
15 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献