Author:
Kudryashov Sergey I.,Allen Susan D.,Shukla Shishir D.
Subject
General Chemical Engineering
Reference40 articles.
1. Nanoparticle removal from substrates with pulsed-laser induced plasma and shock waves
2. Engelsberg , A. C. 1998 . Transition from laboratory to manufacturing for a dry, laser-assisted cleaning technology. InLaser Applications in Microelectronic and Optoelectronic Manufacturing III. Bellingham , Wash. : SPIE . p. 100 .
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