Synthesis and characterization of new unsymmetrical β-diketiminate tris(dimethylamido)hafnium(IV) complexes as potential precursors for the MOCVD of HfO2-Reference-Cited by-同舟云学术

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Synthesis and characterization of new unsymmetrical β-diketiminate tris(dimethylamido)hafnium(IV) complexes as potential precursors for the MOCVD of HfO2

Published:2014-12-11 Issue:1 Volume:68 Page:27-37
ISSN:0095-8972
Container-title:Journal of Coordination Chemistry
language:en
Short-container-title:Journal of Coordination Chemistry

Author:

Patil Siddappa A.¹²³,Fahlman Bradley D.²³

Affiliation:

1. Centre for Nano and Material Sciences, Jain University, Bangalore, India

2. Science of Advanced Materials Program, Central Michigan University, Mount Pleasant, MI, USA

3. Department of Chemistry, Central Michigan University, Mount Pleasant, MI, USA

Publisher

Informa UK Limited

Subject

Materials Chemistry,Physical and Theoretical Chemistry

Link

https://www.tandfonline.com/doi/pdf/10.1080/00958972.2014.987764

Reference31 articles.

1. Molecular design of improved precursors for the MOCVD of electroceramic oxides

2. Advanced Materials for Optics and Electronics

3. Metal alkoxides as precursors for electronic and ceramic materials

4. High-κ gate dielectrics: Current status and materials properties considerations

5. Physical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 27.28 Product Class 28: β-Diketimines (1,3-Diimines);Knowledge Updates 2021/2;2021

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