Modelling oxygen vacancies at the Si(100)-SiO2 interface

Author:

Carniato S.1,Boureau G.1,Harding J. H.2

Affiliation:

1. a Laboratoire de Chimie Physique, Matière et Rayonnement, Université Pierre et Marie Curie , 11 rue Pierre et Marie Curie, 75231, Paris Cedex , 05 , France

2. b Materials Research Centre, Department of Physics and Astronomy , University College London , Gower Street, London , WC1E 6BT, England

Publisher

Informa UK Limited

Subject

Metals and Alloys,Physics and Astronomy (miscellaneous),Condensed Matter Physics,General Materials Science,Electronic, Optical and Magnetic Materials

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Thermochemistry and modeling in oxides;Journal of Alloys and Compounds;2001-06

2. Thermodynamic analysis of hole trapping in SiO2 films on silicon;Journal of Applied Physics;2001-01

3. Local density approximation and generalized gradient approximation calculations for oxygen and silicon vacancies in silica;The Journal of Chemical Physics;2000-06

4. Study of oxygen vacancies in silica using ultra soft pseudopotentials;Journal of Non-Crystalline Solids;1999-04

5. Constraint theory and defect densities at (nanometer SiO[sub 2]-based dielectric)/Si interfaces;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

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