Preparation of Epitaxial Pt Bottom Electrode and Tunability of (Ba,Sr)TiO3 Thin Film Deposited on Si Substrate

Author:

Wakiya Naoki1,Higuchi Akinori2,Sakamoto Naonori1,Mizutani Nobuyasu3,Kiguchi Takanori4,Suzuki Hisao5,Shinozaki Kazuo2

Affiliation:

1. a Department of Materials Science and Chemical Engineering , Shizuoka University , 3-5-1 Johoku, Naka-ku, Hamamatsu , 432-8561 , Japan

2. b Department of Metallurgy and Ceramics Science , Tokyo Institute of Technology , 2-12-1 O-okayama, Meguro-ku, Tokyo , 152-8550 , Japan

3. c Tokyo National College of Technology , 1220-2, Kunugida-machi, Hachioji-shi, Tokyo , 193-0997 , Japan

4. e Institute for Materials Research, Tohoku University , 2-1-1 Katahira, Aoba-ku, Sendai , 980-8577 , Japan

5. d Graduate School of Science and Technology , Shizuoka University , 3-5-1 Johoku, Naka-ku, Hamamatsu , 432-8561 , Japan

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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