Fabrication of High Frequency Bulk Acoustic Wave Resonator Using Thinned Single-Crystal Lithium Niobate Layers
Author:
Affiliation:
1. a FEMTO-ST Institute, UMR CNRS 6174, UFC-ENSMM-UTBM, 32, Avenue de l'Observatoire , 25044 , Besançon , France
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/00150190801997872
Reference7 articles.
1. ELASTIC WAVE ATTENUATION IN LITHIUM NIOBATE
2. Evidence for complete surface wave band gap in a piezoelectric phononic crystal
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