Fabrication of PZT Thin Films by Liquid Delivery MOCVD with Conventional Multi-Sources and a Novel Cocktail Source-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Fabrication of PZT Thin Films by Liquid Delivery MOCVD with Conventional Multi-Sources and a Novel Cocktail Source

Published:2003-03 Issue:1 Volume:293 Page:69-88
ISSN:0015-0193
Container-title:Ferroelectrics
language:en
Short-container-title:Ferroelectrics

Author:

Shiosaki Tadashi,Okamura Soichiro,Miyake Masato,Otani Yohei,Abe Norikazu

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://www.tandfonline.com/doi/pdf/10.1080/00150190390238234

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. THIN-FILM FORMATION BY USING FLASH-BOILING SPRAY;Atomization and Sprays;2015

2. Deposition of Metals and Metal Oxides by Means of Metal Enolates;PATAI'S Chemistry of Functional Groups;2010-09-15

3. Formation Mechanism of Oriented Pb(Zr,Ti)O3Thin Films on Platinum Bottom Electrodes from Amorphous Films Prepared by Liquid Delivery Metalorganic Chemical Vapor Deposition;Japanese Journal of Applied Physics;2009-09-24

4. Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing;Journal of Applied Physics;2008-09-15

5. Fabrication of Ferroelectric Pb(Zr,Ti)O3Thin Films by Spray Metalorganic Chemical Vapor Deposition;Japanese Journal of Applied Physics;2007-07-13

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP