Chemical Reactions During Wet-Etching Process of LSMO/PZT/LSMO-Structured Device Fabrication
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://www.tandfonline.com/doi/pdf/10.1080/00150190902873295
Reference8 articles.
1. Ferroelectrics, microsystems and nanotechnology
2. Electroceramics: looking ahead
3. Ferroelectric thin and thick films for microsystems
4. Some physical and technological aspects of designing of ferroelectric non-volatile SRAM
5. Chemical etching of thin film PLZT
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