Modeling the Etching Rate and Uniformity of Plasma-Aided Manufacturing Using Statistical Experimental Design
Author:
Affiliation:
1. a Department of Industrial and Systems Engineering , The Hong Kong Polytechnic University , Hung Hom , Hong Kong
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/10426910600837798
Reference24 articles.
1. Box , G.E.P. Draper , N.R. Empirical Model-Building and Response Surfaces ; Wiley : New York , 1987 ; 1 pp .
2. An efficient methodology for building macromodels of IC fabrication processes
3. Study of etch rate characteristics of SF/sub 6//He plasmas by response-surface methodology: effects of interelectrode spacing
4. Development of a Multistep SiO2 Plasma Etching Process in a Minibatch Reactor Using Response‐Surface Methodology
5. n+‐Polysilicon Etching in CCl4 / He Discharges: Characterization and Modeling
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods;Applied Thermal Engineering;2024-02
2. Optimizing Process Recipe for Critical Dimensions in Dry Etching Process;IEEE Transactions on Semiconductor Manufacturing;2021-02
3. Development of a Large-Area Hot Embossing Mold with Micro-Sized Structures;Materials Science;2018-11-15
4. A cost-effective approach using recycled materials to fabricate micro-hot embossing dies for microfabrication;The International Journal of Advanced Manufacturing Technology;2017-10-03
5. Development of low-cost hot embossing stamps with long life span and environmental protection;The International Journal of Advanced Manufacturing Technology;2016-12-28
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3