Correlation Between Sputtering Conditions and Growth Properties of (TiAl)N/AlN Multilayer Coatings
Author:
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1080/10426910902840995
Reference24 articles.
1. Tribological investigation of TiAlCrN and TiAlN/CrN coatings grown by combined steered-arc/unbalanced magnetron deposition
2. Titanium aluminum nitride films: A new alternative to TiN coatings
3. On structure and properties of sputtered Ti and Al based hard compound films
4. High-temperature oxidation of ion-plated TiN and TiAlN films
5. Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition
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