1. Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin, People’s Republic of China
2. Chinese Academy of Sciences, Institute of Acoustics, Beijing, People’s Republic of China
3. National Center for Nanoscience and Technology, Beijing, People’s Republic of China
4. School of Mechanical Engineering, Tianjin University of Technology, Tianjin, People’s Republic of China
5. ABU-SZ, Sunway Communication Company Ltd., Shenzhen, People’s Republic of China