1. Key Laboratory of Terahertz Solid-State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2. Key Laboratory of Terahertz Solid-State Technology, Graduate University of Chinese Academy of Sciences, Beijing 100049, China
3. The Center for Microelectronics, Shanghai Aerospace Research Institute of Electronic Technology, Shanghai 201109, People’s Republic of China